EQUIPMENTS


equipments-en

Ultra-high vacuum equipments

Molecular Beam Epitaxy : MBE “MBE-Dai”
  • FT-IR (Bruker Optics Vertex 70)
    RHEED-gun (Vieetech VE052)
    RHEED Image analysis system (K-space KSA400)
    Q-mass x2 (Spectra MONITORR; SRS RGA100)
    LEED-AES (OCI BDL-600IR)
    K-cell x3 (EPI)
    Multi(x3) E-gun (Vieetech)
    Sputter-gun (ULVAC-PHI USG3)
    Ion-source (SPECS IQE 12/38)

    Schematic Diagram


Molecular Beam Epitaxy “MBE-Jr.”
  • FT-IR (Bomem MB100)
    RHEED-gun (Vieetech VE052)
    RHEED Image analysis system (K-space KSA400)
    Q-mass (Spectra MONITORR)
    E-gun (Vieetech)
    Sputter-gun (Omegatron OMI-0010)
    Arc-plasma gun (ULVAC APS-1)

    Schematic Diagram


Molecular Beam Epitaxy “B-NEDO”
  • 分析分子線エピタキシー装置 “B室NEDO” (D3)
  • FT-IR (Bomen MB100)
    LEED (OCI BDL-400IR)
    Evaporation source x2 (AVC)
    Arc-plasma gun (ADVANCE-RIKO APS-1)
    Sputter-gun (Omegatoron OMI-0043CKE)

    Schematic Diagram


UHV Arc-plasma-deposition  ”APD”
  • 超高真空アークプラズマ装着装置 “アークプラズマ” (A406)
  • Arc-plasma gun x3 (ADVANCE-RIKO APS-1)
    RHEED-gun (AVC RDA-005G)
    E-gun (AVC)
    Sputter-gun (PSP ISIS3000)

    Schematic Diagram


UHV Scanning Tunneling Microscopy  “UHV-STM” (D3)
  • UHV-STM (JEOL JSPM-4500S + SEINAN UHV-EC transfer rod)
    X-ray-gun (SPECS XR50)
    Electron energy analyser (SPECS PHOIBOS 100 MCD-5)
    LEED / Auger Spectrometers (OCI BDL 600IR)
    Evasporation source x2 (Beamtron)
    Low energy neutral ion gun (Omegatron OMI-0736ND)

    Schematic Diagram

Electrochemical Measurement Systems・Surface Structural Evaluation Systems

Scanning Probe Microscope  “SPM”
  • 走査プローブ顕微鏡

  • Bruker Nano MultiMode + halcyonic nano20


Electrochemical Scanning Tunneling Microscope “EC-STM”
  • 電気化学走査トンネル顕微鏡
  • Bruker Nano MultiMode + Bruker ECM-3

Scanning Tunneling Microscope  ”NaioSTM”
  • 一体型走査トンネル顕微鏡

  • Nanosurf : NaioSTM


Gas Chromatograph for Electroluysis Products “GC”
  • ガスクロマトグラフ

  • Shimazu GC-2014 + Toho Technical Research PS-14 Detector:TCD & FID


Glove Box + Electrochemical Measurement system  “Glove Box”